DOP series (Piston pump)
GLD series (Oil Sealed rotary vacuum pump)
VDN series (Oil Sealed rotary vacuum pump)
PVD –series Oil Sealed rotary vacuum pump
VSN-series Oil Sealed rotary vacuum pump
NB series Booster Pump
NRL series Dry Pump
YM pump Unit
Vacuum gauge
Option parts and vacuum oil
NOC series (Oil cleaner)
NWS series (Oil water separator)
Gatch系列皮拉尼真空计
Display unit ISG1-N1
This is channel display and can be used as thermal cathode ionization vacuum gauge, cold-cathode ionization gauge and diaphragm vacuum gauge when connected with certain sensor. It can indicate measuring pressure and set the pressure output point to achieve simple operation. Furthermore, remote control and measurement can also be achieved by display unit. Besides, it has gained CE.
Applications
• For vacuum equipment requiring pressure display.
• For vacuum equipment requiring multiple setting points.
• For vacuum equipment requiring RS-485 communication.
Features
• Wide-range Measurement Measures from atmospheric pressure to 5×10-8Pa.
• Wiring Reduction Combined sensor and controller, thus reducing cables, saving space and energy.
• Input voltage: DC24V.
• Measured value output signal Pressure is 0 to 10V Log output .
• Improvement in Visibility LED error verification for better visibility.
• Maintenance Sensor head can be replaced easily.
• Control Output Signal 3 set point output.
• Type RS485 communication.
• Metal shell, good heat dissipation.
• Various vacuum units can be displayed.
• Certification Conforms with CE, RoHS.
SW1-N1 / SW1-N2
This is a wide range Pirani gauge which measures from atmospheric pressure to 5×10-2Pa. And conforms with CE, RoHS.
Applications
• Process control in low vacuum processes such as for photovoltaic field, FPD, semiconductor, optics and electronic parts manufacturing systems.
• Process control in low vacuum range processes for industrial equipment such as vacuum furnaces, etc.
• Process control in low vacuum system, which requires multiple process chambers, such as in-line sputtering and single wafer processing equipment.
Features
• Wide-range Measurement Measures from atmospheric pressure to 5×10-2Pa.
• Wiring Reduction Combined sensor and controller, thus reducing cables, saving space and energy.
• Input voltage: DC24V.
• Measured value output signal Pressure is 0 to 10V Log output.
• Improvement in Visibility LED error verification for better visibility.
• Maintenance Sensor head can be replaced easily.
• SW1-N1 with 2 set point output
• SW1-N2 with type RS-232C, RS-485 communication.
• Metal shell, good heat dissipation.
Gatch-Series Cold cathode ion gauge
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SC1-N / Sensor Unit SC1-N
SC1-N is a cold cathode vacuum gauge. Since no filamentis used, long lifetime between gauge head maintencance is expected. Because there are no filaments to burn out, the gauge is also undamaged by accidental exposure to atmospheric pressure. Easy maintenance also reduces the cost of ownership.
Features
• Be able to connect with PLC without display unit.
• Operated by DC24V.
• Easy maintenance.
• Output of analog signal and 2 set points is possible.
Applications
• Process control in the pressure range of precision vacuum equipment used for semiconductor. optica and electronic parts manufacturing.
• Process control in low vacuum range for industrial equipment such sa furnaces.
* IO and analog GND are mot isolated from the power GND.
