DOP series (Piston pump)
GLD series (Oil Sealed rotary vacuum pump)
VDN series (Oil Sealed rotary vacuum pump)
PVD –series Oil Sealed rotary vacuum pump
VSN-series Oil Sealed rotary vacuum pump
NB series Booster Pump
NRL series Dry Pump
YM pump Unit
Vacuum gauge
Option parts and vacuum oil
NOC series (Oil cleaner)
NWS series (Oil water separator)
YM-RL booster pump unit
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Composition
YM-RL series mechanical booster pump unit contains a dry pump and a mechanical booster pump in a compact bench with all the connecting pipes and a control panel, which is used for vacuum ventilation of production and research equipment.
Applications
Evaporation, Sputtering, iron plating, optical deposition,Vacuum drying, freeze drying,The Ingot growth furnaces of the solar and LED industries, vacuum heat furnace,Sintering furnace and blazing furnace etc.Plasma etching, gas recycling system.
Characteristic
• Oil free, dry, clean.
• Homogenization at low temperature.
• Large pumping speed to reduce exhausting time.
• Excellent anti-corrosion tolerance.
• Low noise, low vibration.
* 2 Not recommended series.
* 3 No condensation of the cooling water.
* 4 The value of the pressure gauge adjusted by a regulator.
* 5 The fixed flow of nitrogen gas (axial seal gas) is 5.0SLM.
YM-VD/VS booster pump unit
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Composition
YM-VD / VS series mechanical booster pumping units contain an oil-sealed rotary vacuum pump and a mechanical booster pump in a compact bench with all the connecting pipes and a control panel.
Applications
• Evaporation ,Sputtering,iron plating,optical deposition.
• The Ingot growth furnaces of the solar and LED industries,vacuum heat furnace, sintering furnace and blazing furnace etc.
• Vacuum drying ,freeze drying,leak tester or leak test system,gas recycling system,liquid crystal injector etc.
• Manufactring equipments of compressor, refrigerator,air-conditioner,illuminant,CCFL etc.
* 1 The value is measured by Pirani vacuum gauge.
* 2 The standard motor is 50Hz-380V/400V/415V、60Hz-380V/400V/440V or 50Hz-200V、60Hz-200V/220V.
* 3 VDN301 is equipped with 1.1kW motor at 50Hz and 1.5 kW motor at 60Hz.
* 4 Ensure to use the vacuum oil designated by ULVAC,otherwise it might impair the pump performance and shorten the life cycle.
* 5 Air cooling will do when the pressure is lower than 530 Pa.Water cooling is requied in contiuous operation at a pressure higher than 530 Pa(2L/min).
