PRODUCTS

    YM-RL booster pump unit

      Composition
      YM-RL series mechanical booster pump unit contains a dry pump and a mechanical booster pump in a compact bench with all the connecting pipes and a control panel, which is used for vacuum ventilation of production and research equipment.

      Applications
      Evaporation, Sputtering, iron plating, optical deposition,Vacuum drying, freeze drying,The Ingot growth furnaces of the solar and LED industries, vacuum heat furnace,Sintering furnace and blazing furnace etc.Plasma etching, gas recycling system.

      Characteristic
      •  Oil free, dry, clean.
      •  Homogenization at low temperature.
      •  Large pumping speed to reduce exhausting time.
      •  Excellent anti-corrosion tolerance.
      •  Low noise, low vibration.

Specifications
Dimensions
Pumping rate curve
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* 1  The value is measured by Pirani vacuum gauge.
* 2  Not recommended series.
* 3  No condensation of the cooling water.
* 4  The value of the pressure gauge adjusted by a regulator.
* 5  The fixed flow of nitrogen gas (axial seal gas) is 5.0SLM.